Materials Compatibility with Nitrogen Trifluoride (NF3)

    Volume 3, Issue 5 (May 2006)

    ISSN: 1546-962X

    CODEN: JAIOAD

    Page Count: 16


    Newton, BE
    Vice President, Research and Development and Test Facility Manager, Wendell Hull and Associates Inc., Las Cruces, NM

    Chiffoleau, GJA
    Vice President, Research and Development and Test Facility Manager, Wendell Hull and Associates Inc., Las Cruces, NM

    (Received 21 October 2005; accepted 28 March 2006)

    Abstract

    Nitrogen trifluoride (NF3) is a widely used electronic specialty gas and is considered about 1.5 times more oxidizing than gaseous oxygen. A recent test program was sponsored by seven companies that are heavily involved in the worldwide industrial distribution and use of NF3 to develop several test systems and materials compatibility data for the most common metals and nonmetals utilized in NF3 transfer systems. This paper presents the data developed by the industry steering group on the compatibility of 12 metallic materials and 15 nonmetallic materials with NF3. The flammability of metallic materials were evaluated by their promoted combustion threshold pressure and the nonmetallic materials were evaluated by their autogenous ignition temperature (AIT) and NF3-index for sustained combustion.


    Paper ID: JAI13552

    DOI: 10.1520/JAI13552

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    Author
    Title Materials Compatibility with Nitrogen Trifluoride (NF3)
    Symposium Flammability and Sensitivity of Materials in Oxygen-Enriched Atmospheres, 2006-10-20
    Committee G04