Ultrathin Films to Modify Mechanical and Tribological Behavior of MEMS Components

    Volume 2, Issue 2 (February 2005)

    ISSN: 1546-962X

    CODEN: JAIOAD

    Published Online: 31 January 2005

    Page Count: 16


    Rymuza, Z
    Warsaw University of Technology, Warsaw,

    (Received 30 July 2004; accepted 14 October 2004)

    Abstract

    Possible methods to control mechanical and tribological behavior of contacting/sliding surfaces in MEMS devices are discussed. Two types of ultrathin films were investigated as possible candidates to use as self-lubricating and wear resistant coatings on MEMS components manufactured using silicon. The techniques of deposition and the results of mechanical and tribological studies on micro/nano-scales of these films are presented and discussed. Wear-resistant coatings were deposited and tested multilayer films being the combinations of the single layers produced using TiN, CrN, and NbN.


    Paper ID: JAI12963

    DOI: 10.1520/JAI12963

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    Author
    Title Ultrathin Films to Modify Mechanical and Tribological Behavior of MEMS Components
    Symposium , 0000-00-00
    Committee B08