Published Online: 31 January 2005
Page Count: 16
Warsaw University of Technology, Warsaw,
(Received 30 July 2004; accepted 14 October 2004)
Possible methods to control mechanical and tribological behavior of contacting/sliding surfaces in MEMS devices are discussed. Two types of ultrathin films were investigated as possible candidates to use as self-lubricating and wear resistant coatings on MEMS components manufactured using silicon. The techniques of deposition and the results of mechanical and tribological studies on micro/nano-scales of these films are presented and discussed. Wear-resistant coatings were deposited and tested multilayer films being the combinations of the single layers produced using TiN, CrN, and NbN.
Paper ID: JAI12963