Ti–Al–Si–C–N Hard Coatings Synthesized by Hybrid Arc-Enhanced Magnetron Sputtering

    Volume 8, Issue 2 (February 2011)

    ISSN: 1546-962X

    CODEN: JAIOAD

    Published Online: 21 January 2011

    Page Count: 9


    Wu, Guizhi
    State Key Laboratory for Mechanical Behavior of Materials, Xi’an Jiaotong Univ., Xi'an,

    Liu, Sitao
    State Key Laboratory for Mechanical Behavior of Materials, Xi’an Jiaotong Univ., Xi'an,

    Ma, Shengli
    State Key Laboratory for Mechanical Behavior of Materials, Xi’an Jiaotong Univ., Xi'an,

    Xu, Kewei
    State Key Laboratory for Mechanical Behavior of Materials, Xi’an Jiaotong Univ., Xi'an,

    Ji, Vincent
    ICMMO/LEMHE, Univ. Paris-Sud 11, Orsay Cedex,

    Chu, Paul K.
    Dept. of Physics and Materials Science, City Univ. of Hong Kong, Kowloon,

    (Received 2 July 2010; accepted 16 December 2010)

    Abstract

    Ti–Al–Si–C–N coatings are deposited by hybrid arc-enhanced magnetron sputtering and characterized by various micro and macro-tools. X-ray diffraction, high-resolution transmission electron microscopy, and X-ray photoelectron spectroscopy reveal that the coatings are probably nanocomposites consisting of nanocrystallites and amorphous phases. They are generally in the form of nc-(Ti,Al)(C,N)/a-SiN/a-C, depending on the composition of the coatings. With increasing Al concentrations, the X-ray diffraction peaks shift to a lower angle and the measured hardness diminishes, implying a reduced contribution of the self-organized stable nanostructure. The dry friction coefficients of the Ti–Al–Si–C–N coatings are about 0.3, which is lower than that of conventional Ti–Si–N coatings. These coatings can find potential applications requiring heavy contact loading subject to high temperature.


    Paper ID: JAI103223

    DOI: 10.1520/JAI103223

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    Author
    Title Ti–Al–Si–C–N Hard Coatings Synthesized by Hybrid Arc-Enhanced Magnetron Sputtering
    Symposium 18th IFHTSE Congress, 2010-07-26
    Committee D01