Materials Compatibility with Nitrogen Trifluoride (NF<sup>3</sup>)

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Volume 3, Issue 5 (May 2006)

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ISSN: 1546-962X
Page Count: 16

Materials Compatibility with Nitrogen Trifluoride (NF³)
Newton, BE
Vice President, Research and Development and Test Facility Manager, Wendell Hull and Associates Inc., NM

Chiffoleau, GJA
Vice President, Research and Development and Test Facility Manager, Wendell Hull and Associates Inc., NM

(Received 21 October 2005; accepted 28 March 2006)

Abstract

Nitrogen trifluoride (NF³) is a widely used electronic specialty gas and is considered about 1.5 times more oxidizing than gaseous oxygen. A recent test program was sponsored by seven companies that are heavily involved in the worldwide industrial distribution and use of NF³ to develop several test systems and materials compatibility data for the most common metals and nonmetals utilized in NF³ transfer systems. This paper presents the data developed by the industry steering group on the compatibility of 12 metallic materials and 15 nonmetallic materials with NF³. The flammability of metallic materials were evaluated by their promoted combustion threshold pressure and the nonmetallic materials were evaluated by their autogenous ignition temperature (AIT) and NF³-index for sustained combustion.

Keywords:
Nitrogen trifluoride (NF3), promoted combustion, oxygen index, autogenous ignition temperature

Paper ID: JAI13552
DOI: 10.1520/JAI13552
ASTM International is a member of CrossRef.

Author Title Materials Compatibility with Nitrogen Trifluoride (NF³) Symposium Flammability and Sensitivity of Materials in Oxygen-Enriched Atmospheres, 2006-10-20 Committee G04

		Home Journals STPs Manuals Topics Subscriptions/Pricing Digital Library / Journals / Journal of ASTM International (JAI) / Citation Page Volume 3, Issue 5 (May 2006) Click here to download this paper now for $25 PDF (448K) View License Agreement ISSN: 1546-962X Page Count: 16 Materials Compatibility with Nitrogen Trifluoride (NF³) Newton, BE Vice President, Research and Development and Test Facility Manager, Wendell Hull and Associates Inc., NM Chiffoleau, GJA Vice President, Research and Development and Test Facility Manager, Wendell Hull and Associates Inc., NM (Received 21 October 2005; accepted 28 March 2006) Abstract Nitrogen trifluoride (NF³) is a widely used electronic specialty gas and is considered about 1.5 times more oxidizing than gaseous oxygen. A recent test program was sponsored by seven companies that are heavily involved in the worldwide industrial distribution and use of NF³ to develop several test systems and materials compatibility data for the most common metals and nonmetals utilized in NF³ transfer systems. This paper presents the data developed by the industry steering group on the compatibility of 12 metallic materials and 15 nonmetallic materials with NF³. The flammability of metallic materials were evaluated by their promoted combustion threshold pressure and the nonmetallic materials were evaluated by their autogenous ignition temperature (AIT) and NF³-index for sustained combustion. Keywords: Nitrogen trifluoride (NF3), promoted combustion, oxygen index, autogenous ignition temperature Paper ID: JAI13552 DOI: 10.1520/JAI13552 ASTM International is a member of CrossRef. Author Title Materials Compatibility with Nitrogen Trifluoride (NF³) Symposium Flammability and Sensitivity of Materials in Oxygen-Enriched Atmospheres, 2006-10-20 Committee G04