Ultrathin Films to Modify Mechanical and Tribological Behavior of MEMS Components

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Volume 2, Issue 2 (February 2005)

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ISSN: 1546-962X
Page Count: 16

Ultrathin Films to Modify Mechanical and Tribological Behavior of MEMS Components
Rymuza, Z
Warsaw University of Technology,

Abstract

Possible methods to control mechanical and tribological behavior of contacting/sliding surfaces in MEMS devices are discussed. Two types of ultrathin films were investigated as possible candidates to use as self-lubricating and wear resistant coatings on MEMS components manufactured using silicon. The techniques of deposition and the results of mechanical and tribological studies on micro/nano-scales of these films are presented and discussed. Wear-resistant coatings were deposited and tested multilayer films being the combinations of the single layers produced using TiN, CrN, and NbN.

Keywords:
ultrathin films, MEMS tribology

Paper ID: JAI12963
DOI: 10.1520/JAI12963
ASTM International is a member of CrossRef.

Author Title Ultrathin Films to Modify Mechanical and Tribological Behavior of MEMS Components Symposium , 0000-00-00 Committee B08

		Home Journals STPs Manuals Topics Subscriptions/Pricing Digital Library / Journals / Journal of ASTM International (JAI) / Citation Page Volume 2, Issue 2 (February 2005) Click here to download this paper now for $25 PDF (448K) View License Agreement ISSN: 1546-962X Page Count: 16 Ultrathin Films to Modify Mechanical and Tribological Behavior of MEMS Components Rymuza, Z Warsaw University of Technology, Abstract Possible methods to control mechanical and tribological behavior of contacting/sliding surfaces in MEMS devices are discussed. Two types of ultrathin films were investigated as possible candidates to use as self-lubricating and wear resistant coatings on MEMS components manufactured using silicon. The techniques of deposition and the results of mechanical and tribological studies on micro/nano-scales of these films are presented and discussed. Wear-resistant coatings were deposited and tested multilayer films being the combinations of the single layers produced using TiN, CrN, and NbN. Keywords: ultrathin films, MEMS tribology Paper ID: JAI12963 DOI: 10.1520/JAI12963 ASTM International is a member of CrossRef. Author Title Ultrathin Films to Modify Mechanical and Tribological Behavior of MEMS Components Symposium , 0000-00-00 Committee B08