1. Scope
The document will cover calibration of subatmospheric pressure measurement instruments over a range of 760 Torr to 10-9 Torr with inert gases. The scope of the standard will be limited to the use of transfer standards. It is expected that this standard may need to have two parts 1) mid vacuum, 2) high vacuum.
There are no current standards with the scope of vacuum gage calibration within the US. The ISO standard is of limited use and detail.
Keywords
Vacuum gage, calibration, standard
The title and scope are in draft form and are under development within this ASTM Committee.
Citing ASTM Standards
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