1. Scope
The purpose of this document is to define a method for testing components being considered for installation in a high-purity gas distribution system using an Auger Electron Spectroscopy (AES) system. Data from the application of this test method is expected to help in component characterization.
This document describes a test method to characterize the composition and thickness of the chromium enriched oxide layer of stainless steel surfaces in tubing, fitting, valves, and other components using Auger Electron Spectroscopy.
This procedure describes the measurement procedure to collect a compositional depth profile for Cr, Fe, Ni, O and C within the outer 20 nanometers, nm, (or until base composition is reached) of the specimen surface. The measurements provide oxide thickness and chromium enrichment information throughout the passivated or electropolised surface modified test is destructive in that it necessitates the sectioning of a piece of tubing or other components to approximately 1cm2. The surface of this specimen is eroded using a sputter ion beam, in a cyclical fasion, and the newly revealed surface analyzed for composition by Auger electron spectroscopy.
The standard is needed because the existing (SEMI) standard needs replacing. Users of the standard are the semiconductor and water treatment industries and testing laboratories.
Keywords
Auger; depth profile; stainless stee; passivation; AES; oxide thickness; ICS Number Code
The title and scope are in draft form and are under development within this ASTM Committee.
Citing ASTM Standards
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