ASTM WK5036

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Work Item: ASTM WK5036 - New Standard Test Method for Wear and Friction Testing of Polishing Pads, Slurries, and Pad Conditioners in Chemical-Mechanical Polishing (CMP).

Developed by Subcommittee: G02.30 | Committee G02 Home | Contact Staff Manager

1. Scope

This test method describes a procedure for measuring wear and friction on Polishing Pads, Slurries, and Pad Conditioners in Chemical-Mechanical Polishing (CMP).

Keywords

CMP; chemical-mechanical polishing; polishing pads

The title and scope are in draft form and are under development within this ASTM Committee.

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Work Item Status:
Date Initiated:6-2-2004
Technical Contact: Norm Gitis

Status: Draft Under Development

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