ASTM WK41940

    Revision of E1127 - 08 Standard Guide for Depth Profiling in Auger Electron Spectroscopy

    (What is a Work Item?)

    Active Standard: E1127 - 08

    Developed by Subcommittee: E42.03 | Committee E42 | Contact Staff Manager



    WK41940

    1. Rationale

    Review/revise current document


    Keywords

    angle lapping; angle-resolved AES; Auger electron spectroscopy; ball cratering; compositional depth profiling; cross sectioning; depth profiling; depth resolution; sputter depth profiling; sputtering; thin films; Surface analysis--spectrochemical analysis; Angle lapping and staining technique; Argon atmospheres; Auger electron spectroscopy (AES); Ball cratering; Crater edge profiling; Depth profiling; Gases; Ion sputtering; Noble gas ions; Nondestructive evaluation (NDE); Polishing properties; Sputter depth profiling data; Xenon;
    Citing ASTM Standards
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    Work Item Status

    Date Initiated:
    05-01-2013

    Technical Contact:
    Hong Piao

    Status:
    Draft Under Development