1. Scope
1.1 This specification covers the dimensions of knife-edge-style flanges and their associated gaskets used in vacuum systems for pressures ranging from 10 to the fifth power to 10 to the minus eleven power Pascals. Such flanges are widely used throughout vacuum technology applications in semiconductor processing tools, surface analysis systems, space simulation systems, and general research requiring vacuum. 1.2 Units--The values stated in either SI units or inch-pound units are to be regarded separately as the standard. The values stated in each system may not be exact equivalents; therefore, each system shall be used independently of the other. Combining values from the two systems may result in nonconformance with the standard. 1.3 This standard does not address any safety concerns, if any, associated with the use of such flanges or the use of this standard to define such flanges. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
It is important that flanges be interchangeable between multiple suppliers for users to achieve the design intent of the vacuum hardware--leak-free seals.
Keywords
flange; rotatable flange; vacuum seal; gasket; knife edge; vacuum hardware; metal seal; vacuum fitting; metal gasket; outgassing
The title and scope are in draft form and are under development within this ASTM Committee.
Citing ASTM Standards
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