Standards

ASTM F388-84


Withdrawn Standard: ASTM F388-84 Method for Measurement of Oxide Thickness on Silicon Wafers and Metallization Thickness by Multiple-Beam Interference (Tolansky Method) (Withdrawn 1993)


WITHDRAWN, NO REPLACEMENT


There is no PDF download available at this time, however you may purchase a copy of this document from Global Engineering Documents (Email: globalcustomerservice@ihs.com; Phone: 800-854-7179 or 303-397-7956).

more info


ASTM License Agreement

F388 F388 F388 F388 F388 F388 F388 F388 F388 F388