Standard Withdrawn, No replacement   Last Updated: Aug 16, 2017 Track Document
ASTM F1152-02

Standard Test Method for Dimensions of Notches on Silicon Wafers (Withdrawn 2003)

Standard Test Method for Dimensions of Notches on Silicon Wafers (Withdrawn 2003) F1152-02 ASTM|F1152-02|en-US Standard Test Method for Dimensions of Notches on Silicon Wafers (Withdrawn 2003) Standard new BOS Vol. 10.04 Committee F01
$ 0.00 Out of stock

Scope

This standard was transferred to SEMI (www.semi.org) May 2003

1.1 This test method covers a nondestructive procedure to determine whether or not the dimensions of fiducial notches on silicon wafers fall within specified limits.

1.2 The values stated in SI units are to be regarded as the standard. The values given in parentheses are for information only.

1.3 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Language unavailable
Format unavailable
Related
Reprints and Permissions
Reprints and copyright permissions can be requested through the
Copyright Clearance Center