Standards

ASTM E2530 - 06 Standard Practice for Calibrating the Z-Magnification of an Atomic Force Microscope at Subnanometer Displacement Levels Using Si(111) Monatomic Steps

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E2244 Standard Test Method for In-Plane Length Measurements of Thin, Reflecting Films Using an Optical Interferometer

E2245 Standard Test Method for Residual Strain Measurements of Thin, Reflecting Films Using an Optical Interferometer

E2246 Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer

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