Standards

ASTM E996 - 04


ASTM E996 - 04 Standard Practice for Reporting Data in Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy


Active Standard ASTM E996 Developed by Subcommittee: E42.03 |Book of Standards Volume: 03.06

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Description Related Products

ASTM E996

Significance and Use

Include the experimental conditions under which spectra are taken in the Experiment section of all reports and publications.

Identify any parameters that are changed between different spectra in the Experiment section of publications and reports, and include the specific parameters applicable to each spectrum in the figure caption.

1. Scope

1.1 Auger and x-ray photoelectron spectra are obtained using a variety of excitation methods, analyzers, signal processing, and digitizing techniques.

1.2 This practice lists the desirable information that shall be reported to fully describe the experimental conditions, specimen conditions, data recording procedures, and data transformation processes.

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.


2. Referenced Documents

E 1078 Guide for Specimen Preparation and Mounting in Surface Analysis
E 1127 Guide for Depth Profiling in Auger Electron Spectroscopy
E 983 Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy
E 995 Guide for Background Subtraction Techniques in Auger Electron Spectroscopy and X-Ray Photoelectron Spectroscopy
E673 Terminology Relating to Surface Analysis
E902 Practice for Checking the Operating Characteristics of X-Ray Photoelectron Spectrometers


Index Terms

Auger electron spectroscopy; Surface analysis; ICS Number Code 19.100


DOI: 10.1520/E0996-04

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