1. Scope
1.1 This terminology is related to the various disciplines involved in surface analysis.
1.2 The definitions listed apply to (a) Auger electron spectroscopy (AES), (b) X-ray photoelectron spectroscopy (XPS), (c) ion-scattering spectroscopy (ISS), (d) secondary ion mass spectrometry (SIMS), and (e) energetic ion analysis (EIA).
Index Terms
terminology; surface analysis; ICS Number Code 01.040.17; 17.040.20
DOI: 10.1520/E0673-03

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