Standards

ASTM E673 - 03


ASTM E673 - 03 Standard Terminology Relating to Surface Analysis


Active Standard ASTM E673 Developed by Subcommittee: E42.02 |Book of Standards Volume: 03.06

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Description Related Products

ASTM E673

1. Scope

1.1 This terminology is related to the various disciplines involved in surface analysis.

1.2 The definitions listed apply to (a) Auger electron spectroscopy (AES), (b) X-ray photoelectron spectroscopy (XPS), (c) ion-scattering spectroscopy (ISS), (d) secondary ion mass spectrometry (SIMS), and (e) energetic ion analysis (EIA).



Index Terms

terminology; surface analysis; ICS Number Code 01.040.17; 17.040.20


DOI: 10.1520/E0673-03

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