ASTM E2530

Careful use of this practice can yield calibrated z-magnifications traceable to the SI unit of length with uncertainties (k = 2) of approximately 7 % over height ranges of approximately 1 nm.

1. Scope

1.1 This practice covers a measurement procedure to calibrate the z-scale of an atomic force microscope using Si(111) monatomic step height specimens.

1.2 Applications This procedure is applicable either in ambient or vacuum condition when the atomic force microscope (AFM) is operated at its highest levels of z-magnification, that is, in the nanometer and sub-nanometer ranges of z-displacement. These ranges of measurement are required when the AFM is used to measure the surfaces of semiconductors, optical surfaces, and other high technology components.

1.3 The values stated in SI units are to be regarded as the standard. The values given in parentheses are for information only.

1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

2. Referenced Documents

GUM: 1993 Guide to the Expression of Uncertainty in Measurement
ISO Committee Draft 25178-6 Geometrical Products Specification (GPS)---Surface Texture: areal----Part 6: Classification of methods for measuring surface texture.
ISO Draft International Standard 25178-2 Geometrical Products Specification (GPS)---Surface Texture: Areal----Part 2: Terms, Definitions and Surface Texture Parameters.
ISO/TS 21748: 2004 Guidance for the Use of Repeatability, Reproducibility and Trueness Estimates in Measurement Uncertainty Estimation

Index Terms

atomic force microscope; atomic steps; AFM; calibration; measurement; silicon; z-magnification; ICS Number Code 71.040.50

Citing ASTM Standards

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