Significance and Use
This practice is to be used for reporting the experimental and data reduction procedures to be described with the publication of the data.
1. Scope
1.1 This practice lists the minimum information necessary to describe the instrumental, experimental, and data reduction procedures used in acquiring and reporting images generated by secondary ion mass spectrometry (SIMS).
1.2 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
2. Referenced Documents
E1504 Practice for Reporting Mass Spectral Data in Secondary Ion Mass Spectrometry (SIMS)
E673 Terminology Relating to Surface Analysis
Index Terms
imaging; secondary ion mass spectrometry; ICS Number Code 71.040.50
DOI: 10.1520/E1635-06
ASTM International is a member of CrossRef.
Citing ASTM Standards
[Back to Top]
