Significance and Use
This practice is intended for use in reporting the experimental and data reduction procedures described in other publications.
1. Scope
1.1 This practice provides the minimum information necessary to describe the instrumental, experimental, and data reduction procedures used in acquiring and reporting secondary ion mass spectrometry (SIMS) mass spectral data.
This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
2. Referenced Documents
E673 Terminology Relating to Surface Analysis
Index Terms
mass spectral data; SIMS; ICS Number Code 71.040.50
DOI: 10.1520/E1504-06
ASTM International is a member of CrossRef.
Citing ASTM Standards
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