ASTM E1217

1.1 This practice describes methods for determining the specimen area contributing to the detected signal in Auger electron spectrometers and some types of X-ray photoelectron spectrometers when this area is defined by the electron collection lens and aperture system of the electron energy analyzer. The practice is applicable only to those X-ray photoelectron spectrometers in which the specimen area excited by the incident X-ray beam is larger than the specimen area viewed by the analyzer, in which the photoelectrons travel in a field-free region from the specimen to the analyzer entrance, and in which an auxiliary electron gun can be mounted to produce an electron beam of variable energy on the specimen.

1.2 This practice is recommended as a useful means for determining the specimen area viewed by the analyzer for different conditions of spectrometer operation, for verifying adequate specimen and beam alignment, and for characterizing the imaging properties of the electron energy analyzer.

This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

2. Referenced Documents

E1016 Guide for Literature Describing Properties of Electrostatic Electron Spectrometers
E673 Terminology Relating to Surface Analysis
ISO 18115:2001 Surface Chemical Analysis-Vocabulary

Index Terms

perture; auger electron spectroscopy (AES); specimen area; spectrometer; surface analysis; X-ray photoelectron spectroscopy (XPS)

Citing ASTM Standards

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