ASTM E1016

The analyst may use this document to obtain information on the properties of electron spectrometers and instrumental aspects associated with quantitative surface analysis.

1. Scope

1.1 The purpose of this guide is to familiarize the analyst with some of the relevant literature describing the physical properties of modern electrostatic electron spectrometers.

1.2 This guide is intended to apply to electron spectrometers generally used in Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS).

This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

2. Referenced Documents

E1217 Practice for Determination of the Specimen Area Contributing to the Detected Signal in Auger Electron Spectrometers and Some X-Ray Photoelectron Spectrometers
E2108 Practice for Calibration of the Electron Binding-Energy Scale of an X-Ray Photoelectron Spectrometer
E673 Terminology Relating to Surface Analysis
E902 Practice for Checking the Operating Characteristics of X-Ray Photoelectron Spectrometers
ISO18516 Surface Chemical Analysis-Auger Electron Spectroscopy and X-Ray Photoelectron Spectrsocopy-Determination of Lateral Resolution
ISO21270 Surface Chemical Analysis-X-Ray Photoelectron and Auger Electron Spectrometers-Linearity of Intensity Scale
ISO24236 Surface Chemical Analysis-Auger Electron Spectroscopy-Repeatability and Constancy of Intensity Scale
ISO24237 Surface Chemical Analysis-X-Ray Photoelectron Spectroscopy-Repeatability and Constancy of Intensity Scale

Index Terms

electron spectrometers; ICS Number Code 17.220.20

Citing ASTM Standards

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