Standard Historical Last Updated: Mar 02, 2021 Track Document
ASTM E766-98

Standard Practice for Calibrating the Magnification of a Scanning Electron Microscope

Standard Practice for Calibrating the Magnification of a Scanning Electron Microscope E0766-98 ASTM|E0766-98|en-US Standard Practice for Calibrating the Magnification of a Scanning Electron Microscope Standard new BOS Vol. 03.01 Committee E04
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1.1 This practice is designed to calibrate the magnification of scanning electron microscopes (SEMs) using the National Institute of Standards and Technology (NIST) calibration specimen Standard Reference Material (SRM)484. Since the relationship between true magnification and magnification indicated on the SEM readout may be different at different magnifications, this practice must be applied to each magnification for which true magnification is desired.

1.2 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

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Details
Book of Standards Volume: 03.01
Developed by Subcommittee: E04.11
Pages: 6
DOI: 10.1520/E0766-98
ICS Code: 37.020