Standard Historical Last Updated: Jan 11, 2012 Track Document
ASTM E2246-05

Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer

Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer E2246-05 ASTM|E2246-05|en-US Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer Standard new BOS Vol. 03.01 Committee E08
$ 83.00 In stock

Significance and Use

Strain gradient values are an aid in the design and fabrication of MEMS devices.

Scope

1.1 This test method covers a procedure for measuring the strain gradient in thin, reflecting films. It applies only to films, such as found in microelectromechanical systems (MEMS) materials, which can be imaged using an optical interferometer. Measurements from cantilevers that are touching the underlying layer are not accepted.

1.2 This test method uses a non-contact optical interferometer with the capability of obtaining topographical 3-D data sets. It is performed in the laboratory.

This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Price:
Contact Sales
Related
Reprints and Permissions
Reprints and copyright permissions can be requested through the
Copyright Clearance Center
Details
Book of Standards Volume: 03.01
Developed by Subcommittee: E08.05
Pages: 16
DOI: 10.1520/E2246-05
ICS Code: 37.040.20