Standard Historical Last Updated: Aug 16, 2017 Track Document
ASTM E1634-02

Standard Guide for Performing Sputter Crater Depth Measurements

Standard Guide for Performing Sputter Crater Depth Measurements E1634-02 ASTM|E1634-02|en-US Standard Guide for Performing Sputter Crater Depth Measurements Standard new BOS Vol. 03.06 Committee E42
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Scope

1.1 This guide covers the preferred procedure for acquiring and post-processing of sputter crater depth measurements. This guide is limited to stylus-type surface profilometers equipped with a stage, stylus, associated scan and sensing electronics, video system for sample and scan alignment, and computerized system.

1.2 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

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Details
Book of Standards Volume: 03.06
Developed by Subcommittee: E42.08
Pages: 3
DOI: 10.1520/E1634-02
ICS Code: 71.040.50