Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries

Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries D5127-12 ASTM|D5127-12|en-US Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries Standard D5127 Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries> new BOS Vol. 11.01 Committee D19

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Significance and Use

This guide recommends the water quality required for the electronics and microelectronics industries. High-purity water is required to prevent contamination of products during manufacture, since contamination can lead to an unacceptable, low yield of electronic devices.

The range of water purity is defined in accordance with the manufacturing process. The types of ultra-pure water are defined with respect to device line width. In all cases, the water-quality recommendations apply at the point of distribution.

The limits on the impurities are related to current contamination specifications and to available analytical methods (either performed in a suitable clean laboratory or by on-line instrumentation). On-line and off-line methods are used in accordance with current industry practice. Concentration of the sample may be required to measure the impurities at the levels indicated in Table 1.

TABLE 1 Requirements for Water at the Point of Distribution in the Electronics and Semiconductor Industries^A

Parameter	Type E-1	Type E-1.1	Type E-1.2^B	Type E-1.3^B	Type E-2	Type E-3	Type E-4
Linewidth (microns)	1.0–0.5	0.35–0.25	0.18–0.09	0.065–0.032	5.0–1.0	>5.0
Resistivity, 25°C (On-line)	18.1	18.2	18.2	18.2	16.5	12	0.5
TOC (μg/L) (on-line for <10 ppb)	5	2	1	1	50	300	1000
On-line dissolved oxygen (μg/L)	25	10	3	10
On-Line Residue after evaporation (μg/L)	1	0.5	0.1
On-line particles/L (micron range)
>0.05 μm				500^C
0.05–0.1		1000	200	N/A^C
0.1–0.2	1000	350	<100	N/A
0.2–0.5	500	<100	<10	N/A
0.5-1.0	200	<50	<5	N/A
1.0	<100	<20	<1	N/A
SEM particles/L (micron range)
0.1–0.2	1000	700	<250	N/A
0.2–0.5	500	400	<100	N/A	3000
0.5–1	100	50	<30	N/A		10 000
10	<50	<30	<10	N/A			100 000
Bacteria in CFU/Volume
100 mL Sample	5	3	1	N/A	10	50	100
1 L Sample			10	1
10 L Sample				1
Silica – total (μg/L)	5	3	1	0.5	10	50	1000
Silica – dissolved (μg/L)	3	1	0.5	0.5
Anions and Ammonium by IC (μg/L)
Ammonium	0.1	0.10	0.05	0.050
Bromide	0.1	0.05	0.02	0.050
Chloride	0.1	0.05	0.02	0.050	1	10	1000
Fluoride	0.1	0.05	0.03	0.050
Nitrate	0.1	0.05	0.02	0.050	1	5	500
Nitrite	0.1	0.05	0.02	0.050
Phosphate	0.1	0.05	0.02	0.050	1	5	500
Sulfate	0.1	0.05	0.02	0.050	1	5	500
Metals by ICP/MS (μg/L)
Aluminum	0.05	0.02	0.005	0.001
Antimony				0.001
Arsenic				0.001
Barium	0.05	0.02	0.001	0.001
Boron^D	0.3	0.1	0.05	0.050
Cadmium				0.010
Calcium	0.05	0.02	0.002	0.001
Chromium	0.05	0.02	0.002	0.001
Copper	0.05	0.02	0.002	0.001	1	2	500
Iron	0.05	0.02	0.002	0.001
Lead	0.05	0.02	0.005	0.001
Lithium	0.05	0.02	0.003	0.001
Magnesium	0.05	0.02	0.002	0.001
Manganese	0.05	0.02	0.002	0.010
Nickel	0.05	0.02	0.002	0.001	1	2	500
Potassium	0.05	0.02	0.005	0.001	2	5	500
Sodium	0.05	0.02	0.005	0.001	1	5	1000
Strontium	0.05	0.02	0.001
Tin				0.010
Titanium				0.010
Vanadium				0.010
Zinc	0.05	0.02	0.002	0.001	1	5	500
Temperature Stability (K)				±1
Temperature Gradient (K/10 min)				<0.1
Dissolved Nitrogen On-line (mg/L)				8-18
Dissolved Nitrogen Stability (mg/L)				±2

^A The user should be advised that analytical data often are instrument dependent and technique dependent. Thus, the numbers in Table 1 are only guidelines. This table will be revised whenever the semiconductor industry develops new linewidths, thereby keeping the guidelines current.

^B Values shown in Type E-1.3 are a result of aligning ITRS risk factors of known contaminates to the production processes found in current semiconductor processing for the linewidth of interest and may differ in a few cases to those found in Type E-1.2. Users who wish to use the higher numbers for Type E-1.2 water should feel free to do so.

All values are equal to or less than with the exception of Resistivity.

^C Particle metrology has not kept pace with the decreasing line-width of semiconductor manufacturing. Current line-widths require the ability to monitor 20-nm particles. However, existing Optical Particle Counters (OPCs) are only capable of detecting 50-nm particles with a counting efficiency of <5%, and a background count (noise level) of 500 particles per liter. Particle-counting statistics become important as count levels approach the noise level. Therefore, the OPC setup and performance must be optimized. Particle levels must consistently be within the noise level of any OPC (regardless of any specified level).

^D Boron is monitored only as an operational parameter for monitoring the ion-exchange beds.

Scope

1.1 This guide provides recommendations for water quality related to electronics and semiconductor-industry manufacturing. Seven classifications of water are described, including water for line widths as low as 0.032 micron. In all cases, the recommendations are for water at the point of distribution (POD).

1.2 Water is used for washing and rinsing of semiconductor components during manufacture. Water is also used for cleaning and etching operations, making steam for oxidation of silicon surfaces, preparing photomasks, and depositing luminescent materials. Other applications are in the development and fabrication of solid-state devices, thin-film devices, communication lasers, light-emitting diodes, photo-detectors, printed circuits, memory devices, vacuum-tube devices, or electrolytic devices.

1.3 Users needing water qualities different from those described here should consult other water standards, such as Specification D1193 and Guide D5196.

1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

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Book of Standards Volume: 11.01

Developed by Subcommittee: D19.02

Pages: 6

DOI: 10.1520/D5127-12

ICS Code: 13.060.25; 71.100.99

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Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries

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