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STP 990
Semiconductor Fabrication: Technology and Metrology
Editor(s): D C Gupta
Pages: 470
Published: 1989
Hard Cover
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$60 |  |
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STP 990 presents 35 papers on: Silicon Crystal Growth and Epitaxial Deposition Techniques; Fabrication Technology; Micro contamination; Metallization and Interconnects; Material Defects and Gettering; and Control Charts, Standards, and Specifications.
Semiconductor Fabrication: Technology and Metrology
ISBN: 0-8031-1273-4
ISBN13: 978-0-8031-1273-5
STOCK# STP990
STP990-C01
STP990-C02
STP990-C03
STP990-C04
STP990-C05
STP990-C06
STP990-C07
STP990-F01
STP990-F02
STP990-R01
STP990-R02
STP990-R03
STP990-SN
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